Principles of Microelectromechanical Systems

This book describes the principles of MEMS via a unified approach and closed- form solutions to micromechanical problems, which have been recently.
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  • Analysis and Design Principles of MEMS Devices;

Lee was a researcher at University of California, Berkeley. He worked for Samsung during , most recently holding the position of principal research scientist. Would you like to tell us about a lower price?

Principles of Microelectromechanical Systems : Ki Bang Lee :

If you are a seller for this product, would you like to suggest updates through seller support? Learn more about Amazon Prime. The building blocks of MEMS design through closed-formsolutions Microelectromechanical Systems, or MEMS, is the technology ofvery small systems; it is found in everything from inkjet printersand cars to cell phones, digital cameras, and medical equipment. Read more Read less. Add both to Cart Add both to List. These items are shipped from and sold by different sellers.

Principles of Microelectromechanical Systems

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An Introduction to Numerical Analysis. There's a problem loading this menu right now. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts.

The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS.

Micro-electromechanical systems (MEMS) - $15,000 Lemelson-MIT “Use it!” Graduate Winner

From there, coverage includes:. Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations. All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions.

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In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry.

The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.


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He has made numerous contributions in micro- and nano-electromechanical systems.